Features
- FOUP feeding time is shortened significantly by utilizing its unique two-robot-arms configuration
- Capable of stocking more than twenty FOUPs at once
- Z-axis foldable construction satisfies various height limitation at the time of transportation
Specifications
*Please see the table by scrolling horizontally.
| FOUP Buffer (FOUP Handling Robot) | |||||||
|---|---|---|---|---|---|---|---|
| FOUP feeding performance | Maximum velocity: 933mm/s (Z-axis/Y-axis) 81deg/s (Arm axis) | ||||||
| Chuck clamp | Maximum stroke: 25mm (at one side) | ||||||
| Safety interlock |
Arm sensor(Collision prevention and feed position detection), FOUP detection sensor, etc. |
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| Required fluid | Clean dry air | ||||||
| Required fluid flow rate | 5L/min | ||||||
| Power supply | 3-phase 50/60 Hz, AC200–230V | ||||||
| Outside dimension (mm) | 2360 (W) × 960 (D) × 2820 (H) [2600 (H) when folded] | ||||||
| Weight | Main unit: 500kg Control box: 27kg | ||||||
*Please see the table by scrolling horizontally.
Applications
- Automated FOUP stocking/trasnferring for semiconductor wafer production equipments