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Supercritical Rinser & Dryer

Supercritical Rinser & Dryer

Supercritical rinser and dryer uses supercritical fluid that does not generate capillarity and surface tension, therefore the instrument can rinse and dry microstructure without distortion and damage.

Features and intended use of the product

Product Lineup

Desk Top Type
SCRD4
(For 4 inch wafer)

Desk Top Type SCRD4

Details of the product

Stationary Type
SCRD6/8
(For 6 inch and 8 inch wafer)

Stationary Type SCRD6/8

Details of the product

Automatic Type
CRD8/12
(For 8 inch and 12 inch)

Automatic Type CRD8/12

Details of the product

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