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Stationary type SCRD6/8 (For 6 inch and 8 inch wafer)

Stationary type SCRD6/8 (For 6 inch and 8 inch wafer)

*Please see the table by scrolling horizontally.

Model SCRD6 SCRD8
Fluid CO2
Pressure 15MPa
Temperature 40℃
Chamber (ID) φ160×40mm (ID) φ230×20mm
Safety function
  • Electrical safety mechanism
  • Mechanical safety mechanism
  • Abnormal overheat preventative mechanism
Control panel Driving program set by a touch screen
Dimension (W) 700× (D) 640
× (H) 985mm (including handle)
(W) 840× (D) 785
× (H) 1,040mm (including handle)
Weight Approx. 150kg Approx. 230kg
Power supply AC100V±10% 50/60Hz 16A (Max.)
Remarks SCRD6 Chamber Chamber
  • High-capacity chamber
    SCRD6: (ID) φ160mm× (D) 40mm
    SCRD8: (ID) φ230mm× (D) 20mm
  • Solvents such as IPA is replaceable with gaseous CO2.
  • Temperature can be measured accurately with the temperature sensor set in the chamber.

Chamber open-close mechanism
The chamber is opened and closed smoothly because a lift type handle is used.

*Please see the table by scrolling horizontally.

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